Product information

CRYOPUMPS (STANDARD) 10" TYPE
CRYO-U10H

FEATURES

  1. Running costs can be lowered by multiple operation (two units)
  2. For experimental equipments and medium-size production facilities.

DIMENSIONS (Unit:mm)

SPECIFICATIONS

Pumping speeds(20degrees) Nitrogen L/s 2,400
Hydrogen 3,600
Argon 2,000
Water 6,900
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 8.0×102(6.0)
Hydrogen 1.5×102(1.1)
Pumping capacity Argon Pa・L(Torr・L) 1.0×108(7.8×105)
Hydrogen 6.7×105(5.0×103)
Cooldown time min(Hz) 110/100(50/60)
Mounting flange UVG-250
Compressor unit C15R
Weight of cryopump kg 29.0

Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours

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