Products
Product information
Accessories
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MAINTENANCE AND REPLACEMENT PARTS
Inner kit, Maintenance seal kit, Maintenance bearing kit, Setting of helium gas back-filling jig, Adsorber
We are proud to offer many different models of cryopumps with proven reliability, excellent performance and quality.
MAINTENANCE AND REPLACEMENT PARTS
Inner kit, Maintenance seal kit, Maintenance bearing kit, Setting of helium gas back-filling jig, Adsorber
ULVAC CRYOGENICS INCORPORATED
■Head Office and Factory
1222-1 yabata,Chigasaki,Kanagawa,253-0085,Japan
TEL:+81-467-85-8884(sales),+81-467-85-9366(service) FAX:+81-467-85-9356
■Kyoto Office
Akebono Bldg 97,Nakajimahoribatacho,Fushimi-ku,Kyoto,612-8452,JAPAN
TEL:＋81-75-605-5590 FAX:＋81-75-605-5591