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Combination of Cryopump and Compressor
Number of cryopumps that one compressor can Run.
| Cryopump | Compressor | |||||
| C10/C10AT | C15R | C30VR | C30MVR | C30PVRT | C40R | |
| U4H | 1 | 3 | 4 | |||
| U6H | 1 | 3 | 4 | |||
| U8H/U8H-U/U8HSP | 1 | 3 | 4 | |||
| U10H/U10HSP | 1 | 2 | (3) | |||
| U12H/U12HSP | 1 | (2) | ||||
| U16/U16P | 1 | |||||
| U20P | 1 | |||||
| U20H | 1 | |||||
| U22P | 1 | |||||
| U22H/U30H | Use 2 Compressors | |||||
The numbers show how many cryopumps can be runnin on one compressor. The numbers in the brackets show optional combination.
Please contact us the combination without above example.
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