Product information

Speed Series TS Type


  1. Cooldown and Warm up take only 5 minutes respectively.
  2. CFC-Free. Refrigerant is He gas.
  3. Can be used in a same manner as CFC traps.
  4. Lightweight and compact. Footprint is 1/3.
  5. Ideal for patch type equipments or film deposition apparatus for optical uses…can be used for all kinds of vacuum equipments.
  6. Patent pending
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