Product information

CRYOPUMPS (STANDARD) 8" TYPE
CRYO-U8HL

FEATURES

  1. Flat and compact design
  2. Supports system downsizing
  3. Multiple operation (up to 3 units)
  • We can also manufacture pumps of other sizes.

DIMENSIONS (Unit:mm)

SPECIFICATIONS

Pumping speeds(20degrees) Nitrogen L/s 1,500
Hydrogen 2,200
Argon 1,200
Water 4,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 1.2×103(8.9)
Pumping capacity Argon Pa・L(Torr・L) 1.6×108(1.2×106)
Hydrogen 1.2×106(9.0×103)
Cooldown time min(Hz) 110/100(50/60)
Mounting flange UVG-200
Compressor unit C10, C10AT, C10ES
Weight of cryopump kg 20

Wide Variety of Models, ranging from 6 diameter to 30 diameter.
*Maintenance interval: every 16,000 hours

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