Product information

CRYOPUMPS (STANDARD) 22" TYPE
CRYO-U22H

FEATURES

  1. Suitable for large deposition systems.
  2. Larger pumping speed for water.

DIMENSIONS (Unit:mm)

SPECIFICATIONS

Pumping speeds(20degrees) Nitrogen L/s 17,000
Hydrogen 25,000
Argon 14,000
Water 39,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 4.1×103(31)
Hydrogen 1.3×103(9.6)
Pumping capacity Argon Pa・L(Torr・L) 8.1×108(6.1×106)
Hydrogen 8.5×106(6.4×104)
Cooldown time min(Hz) 150/135(50/60)
Mounting flange UVG-550
Compressor unit C30VR×2
Weight of cryopump kg 125.0

*Maintenance interval: every 16,000 hours

Export permission of the Ministry of Economy, Trade and Industry is required for export of U22H and U30H.Wide Variety of Models, ranging from 6" diameter to 30" diameter.
COMBINATION OF CRYOPUMP AND COMPRESSOR UNIT

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