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CRYOPUMPS (STANDARD) 22" TYPE
CRYO-U22H
FEATURES
- Suitable for large deposition systems.
- Larger pumping speed for water.
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speeds(20degrees) | Nitrogen | L/s | 17,000 |
| Hydrogen | 25,000 | ||
| Argon | 14,000 | ||
| Water | 39,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 4.1×103(31) |
| Hydrogen | 1.3×103(9.6) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 8.1×108(6.1×106) |
| Hydrogen | 8.5×106(6.4×104) | ||
| Cooldown time | min(Hz) | 150/135(50/60) | |
| Mounting flange | UVG-550 | ||
| Compressor unit | C30VRT×2 | ||
| Weight of cryopump | kg | 125.0 | |
*Maintenance interval: every 16,000 hours
Export permission of the Ministry of Economy, Trade and Industry is required for export of U22H and U30H.
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
COMBINATION OF CRYOPUMP AND COMPRESSOR UNIT
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