Product information

CRYOPUMPS (STANDARD) 20" TYPE
CRYO-U20P

FEATURES

  1. Suitable for large deposition systems and other production equipment.
  2. Suitable for batch type large deposition systems.

DIMENSIONS (Unit:mm)

SPECIFICATIONS

Pumping speeds(20degrees) Nitrogen L/s 10,000
Hydrogen 18,000
Argon 8,400
Water 29,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 1.1×103(8.7)
Hydrogen 5.0×102(3.7)
Pumping capacity Argon Pa・L(Torr・L) 5.8×108(4.4×106)
Hydrogen 4.6×106(3.4×104)
Cooldown time min(Hz) 180/160(50/60)
Mounting flange UVG-500
Compressor unit C30VR
Weight of cryopump kg 69.0

*Maintenance interval: every 16,000 hours
Wide Variety of Models, ranging from 6" diameter to 30" diameter.

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