Product information

CRYOPUMPS (STANDARD) 16" TYPE
CRYO-U16P

FEATURES

  1. Suitable for medium and large-size equipments.
  2. High-load version of the CRYO-U16.

DIMENSIONS (Unit:mm)

SPECIFICATIONS

Pumping speeds(20degrees) Nitrogen L/s 5,000
Hydrogen 10,000
Argon 4,200
Water 16,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 1.6×103(12)
Hydrogen 4.5×102(3.4)
Pumping capacity Argon Pa・L(Torr・L) 4.3×108(3.3×106)
Hydrogen 2.4×106(1.8×104)
Cooldown time min(Hz) 120/110(50/60)
Mounting flange UVG-400
Compressor unit C30VR
Weight of cryopump kg 61.0

Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours

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