Product information

Fast Regeneration Type


Time for regeneration is significantly reduced.

  1. By using an internal heater (mounted inside a cryopump), warm-up and roughing time is reduced by 1/2 to 1/3.*
  2. Cooldown time is reduced to 2/3 by inverter control.*

*The above may differ depending on the usage conditions.
*The picture includes optional parts.

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