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Speciality Cryopumps for Sputtering Process
CRYO-U10HSP
SPECIFICATIONS
| Pumping speed (20℃) | Nitrogen | L/s | 2,400 |
| Hydrogen | 3,600 | ||
| Argon | 2,000 | ||
| Water | 6,900 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.30×103(9.8) |
| Hydrogen | 2.1×102(1.6) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 2.0×108(1.5×106) |
| Hydrogen | 1.2×106(9.0×103) | ||
| Cooldown time | min(Hz) | 120/110(50/60) | |
| Mounting flange | UVG-250,10BANSI | ||
| Compressor unit | C15R | ||
| Weight | Kg | 36.0 | |
*Maintenance interval : every 16,000 hours
*Travelling base is optional.
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