Product information

Speciality Cryopumps for Sputtering Process


Pumping speed (20℃) Nitrogen L/s 2,400
Hydrogen 3,600
Argon 2,000
Water 6,900
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 1.30×103(9.8)
Hydrogen 2.1×102(1.6)
Pumping capacity Argon Pa・L(Torr・L) 2.0×108(1.5×106)
Hydrogen 1.2×106(9.0×103)
Cooldown time min(Hz) 120/110(50/60)
Mounting flange UVG-250,10BANSI
Compressor unit C15R
Weight Kg 36.0

*Maintenance interval : every 16,000 hours
*Travelling base is optional.

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