Product information

Speciality Cryopumps for Sputtering Process


  1. Argon capacity is twice of the standard model (U12H).
  2. Hydrogen pumping speed is 1.5 times of standard model (U12H)
  3. Extended intervals between regenerations means higher tool availability.
  4. Multiple connections (up to 3) can be made.



Pumping speed (20℃) Nitrogen L/s 4,100
Hydrogen 6,000
Argon 3,400
Water 9,500
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 2.0×103(15.0)
Hydrogen 4.1×102(3.1)
Pumping capacity Argon Pa・L(Torr・L) 4.4×108(3.3×106)
Hydrogen 1.6×106(1.2×104)
Cooldown time min(Hz) 90/80(50/60)
Mounting flange UVG-300,10BANSI
Compressor unit C30VR
Weight Kg 42

*Maintenance interval : every 16,000 hours
*Travelling base is optional.

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