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[Basic Knowledge about Cryopumps 7 ]
Unit Conversion Table
1.Pressure
| Pa | Torr | bar | kg/cm2 | psi | atm | |
| Pa | 1 | 7.5E(-3) | 1E(-5) | 1.02E(-5) | 1.45E(-4) | 9.87E(-6) |
| Torr | 133 | 1 | 1.33E(-3) | 1.36E(-3) | 1.93E(-2) | 1.32E(-3) |
| bar | 1E5 | 750 | 1 | 1.02 | 14.5 | 0.987 |
| kg/cm2 | 9.80E4 | 735 | 0.98 | 1 | 14.2 | 0.968 |
| psi | 6.89E3 | 51.7 | 6.89E(-2) | 7.03E(-2) | 1 | 6.80E(-2) |
| atm | 1.01E5 | 760 | 1.01 | 1.03 | 14.7 | 1 |
2.Pumping Speed
| m3/s | L/s | |
| m3/s | 1 | 1E3 |
| L/s | 1E(-3) | 1 |
3.Flow Rate
| Pa・m3/s | Pa・L/s | Torr・L/s | sccm | |
| Pa・m3/s | 1 | 1E3 | 7.52 | 592 |
| Pa・L/s | 1E(-3) | 1 | 7.52E(-3) | 0.592 |
| Torr・L/s | 1.33E(-1) | 133 | 1 | 78.9 |
| sccm | 1.69E(-3) | 1.69 | 1.27E(-2) | 1 |
4.Pumping capacity
| Pa・m3 | Pa・L | Torr・L | L(Standard) | |
| Pa・m3 | 1 | 1E3 | 7.52 | 9.87E(-3) |
| Pa・L | 1E(-3) | 1 | 7.52E(-3) | 9.87E(-6) |
| Torr・L | 1.33E(-1) | 133 | 1 | 1.32E(-3) |
| L(Standard) | 1.01E2 | 1.01E5 | 760 | 1 |
5.Temperature
| K | ℃+273.15 |
| °F | (9/5)℃+32 |
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