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Product information
CRYOPUMPS (STANDARD) 20" TYPE
CRYO-U20P
FEATURES
- Suitable for large deposition systems and other production equipment.
- Suitable for batch type large deposition systems.
DIMENSIONS (Unit:mm)
SPECIFICATIONS
| Pumping speeds(20degrees) | Nitrogen | L/s | 10,000 |
| Hydrogen | 18,000 | ||
| Argon | 8,400 | ||
| Water | 29,000 | ||
| Ultimate pressure | Pa(Torr) | 10-7(10-9) | |
| Maximum throughput | Argon | Pa・L/s(Torr・L/s) | 1.1×103(8.7) |
| Hydrogen | 5.0×102(3.7) | ||
| Pumping capacity | Argon | Pa・L(Torr・L) | 5.8×108(4.4×106) |
| Hydrogen | 4.6×106(3.4×104) | ||
| Cooldown time | min(Hz) | 180/160(50/60) | |
| Mounting flange | UVG-500 | ||
| Compressor unit | C30VRT | ||
| Weight of cryopump | kg | 69.0 | |
*Maintenance interval: every 16,000 hours
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
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