产品信息
Products
产品信息
标准低温泵22型
CRYO-U22H
特征
- Suitable for large deposition systems.
- Larger pumping speed for water.
外形尺寸（单位：mm）
标准规格
| 排气速度（20℃） | 氮气 | L/s | 17,000 |
| 氢气 | 25,000 | ||
| 氩气 | 14,000 | ||
| 水 | 39,000 | ||
| 极限压力 | Pa(Torr) | 10-7(10-9) | |
| 最大流量 | 氩气 | Pa・L/s(Torr・L/s) | 4.1×103(31) |
| 氢气 | 1.3×103(9.6) | ||
| 排气量 | 氩气 | Pa・L(Torr・L) | 8.1×108(6.1×106) |
| 氢气 | 8.5×106(6.4×104) | ||
| 冷却下降时间 | min(Hz) | 150/135(50/60) | |
| 吸气口法兰 | UVG-550 | ||
| 压缩机装置 | C30VRT×2 | ||
| 重量 | kg | 125.0 | |
*保养周期：16,000小时
Export permission of the Ministry of Economy, Trade and Industry is required for export of U22H and U30H.
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
COMBINATION OF CRYOPUMP AND COMPRESSOR UNIT
