Product information

CRYOPUMPS (STANDARD) 12" TYPE
CRYO-U12H

FEATURES

  1. Suitable for medium- and large-size equipments.
  2. Resistant to thermal load. Suitable for various processes.

DIMENSIONS (Unit:mm)

SPECIFICATIONS

Pumping speeds(20degrees) Nitrogen L/s 4,000
Hydrogen 6,000
Argon 3,300
Water 9,500
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum throughput Argon Pa・L/s(Torr・L/s) 2.0×103(15)
Hydrogen 4.1×102(3.1)
Pumping capacity Argon Pa・L(Torr・L) 2.1×108(1.6×106)
Hydrogen 9.8×105(7.4×103)
Cooldown time min(Hz) 85/75(50/60)
Mounting flange UVG-300,10BANSI
Compressor unit C30VR
Weight of cryopump kg 40.0

Wide Variety of Models, ranging from 6" diameter to 30" diameter.
*Maintenance interval: every 16,000 hours

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