■ COMBINATION OF CRYOPUMP AND COMPRESSOR UNIT (Number of cryopumps whici can operate with one compressor. Cryopump Compressor C10 C10E C15V C30V C30MV U6H 1 1 × × 3 U8H U8H-U 1 1 × × 3 U10PU × × 1 × 2 U12H × × × 1 × U16 × × × 1 × U16P × × × 1 × U20P × × × 1 × U22H × × × Use 2 Compressors