| ¡á | CRYOPUMPS (STANDARD) 6" TYPE
U6H table start
| CRYO-U6H |
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| ¡á |
FEATURES |
| 1. |
경량・Compact, 표준품으로
무엇보다도 소형의 Pump. |
| 2. |
실험실, 연구실에서
사용하기에 적합한
소형의 진공장치. |
| 3. |
Multi운전(최대3대)이 가능. |
| 4. |
초고진공(10-8Pa이하)이 가능. |
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¡á | SPECIFICATIONS |
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Pumping speeds(20¡É) | Nitrogen |
L/s |
750 |
| Hydrogen |
1,100 |
| Argon |
620 |
| Water |
2,100 |
| Ultimate pressure |
Pa(Torr) |
10-7(10-9) |
| Maximum throughput |
Argon |
Pa・L/s(Torr・L/s) |
1.1¡¿103(7.9) |
| Hydrogen |
1.1¡¿102(0.8) |
| Pumping capacity |
Argon |
Pa・L(Torr・L) |
5.6¡¿107(4.2¡¿105) |
| Hydrogen |
3.1¡¿105(2.3¡¿103) |
| Cooldown time |
min(Hz) |
80/70(50/60) |
| Mounting flange |
UVG-150,UFC-203 |
| Compressor unit |
C10/C10E |
| Weight of cryopump |
kg |
19 |
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Wide Variety of Models, ranging from 6" diameter to 30" diameter.
[6" Type] [8" Type] [10" Type] [12" Type] [16" Type] [20" Type] [22" Type] [30" Type]
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