| ¡á | CRYOPUMPS (STANDARD) 30" TYPE
U30H table start
| CRYO-U30H |
 |
| ¡á |
FEATURES |
| 1. |
대형
성막장치, Space Chamber등에
최적. |
| 2. |
H2O에 대한
배기속도°¡ 최°í. |
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|
|
¡á | SPECIFICATIONS |
|
Pumping speeds(20¡É) | Nitrogen |
L/s |
28,000 |
| Hydrogen |
43,000 |
| Argon |
23,000 |
| Water |
70,000 |
| Ultimate pressure |
Pa(Torr) |
10-7(10-9) |
| Maximum throughput |
Argon |
Pa・L/s(Torr・L/s) |
2.7¡¿103(20) |
| Hydrogen |
7.4¡¿102(5.6) |
| Pumping capacity |
Argon |
Pa・L(Torr・L) |
7.8¡¿108(5.9¡¿106) |
| Hydrogen |
1.5¡¿107(1.1¡¿105) |
| Cooldown time |
min(Hz) |
240/200(50/60) |
| Mounting flange |
VG-750 |
| Compressor unit |
C30V¡¿2 |
| Weight of cryopump |
kg |
175.0 |
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|
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
[6" Type] [8" Type] [10" Type] [12" Type] [16" Type] [20" Type] [22" Type] [30" Type]
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