■ CRYOPUMPS (STANDARD) 22" TYPE U22H table start CRYO-U22H ■ FEATURES 1. 대형 성막장치에 최적. 2. H2O에 대한 배기속도가 최고. ■ SPECIFICATIONS Pumping speeds(20℃) Nitorgen L/s 17,000 Hydrogen 25,000 Argon 14,000 Water 39,000 Ultimate pressure Pa(Torr) 10-7(10-9) Maximum throughput Argon Pa・L/s(Torr・L/s) 4.1×103(31) Hydrogen 1.3×103(9.6) Pumping capacity Argon Pa・L(Torr・L) 8.1×108(6.1×106) Hydrogen 8.5×106(6.4×104) Cooldown time min(Hz) 150/135(50/60) Mounting flange UVG-550 Compressor unit C30V×2 Weight of cryopump kg 125.0 Wide Variety of Models, ranging from 6" diameter to 30" diameter. [6" Type] [8" Type] [10" Type] [12" Type] [16" Type] [20" Type] [22" Type] [30" Type]