■ CRYOPUMPS (STANDARD) 20" TYPE U20P table start CRYO-U20P ■ FEATURES 1. 대형 성막장치등의 생산장치에 최적. 2. Batch식 대형 성막장치에 최적. ■ SPECIFICATIONS Pumping speeds(20℃) Nitrogen L/s 10,000 Hydrogen 18,000 Argon 8,400 Water 29,000 Ultimate pressure Pa(Torr) 10-7(10-9) Maximum throughput Argon Pa・L/s(Torr・L/s) 1.1×103(8.7) Hydrogen 5.0×102(3.7) Pumping capacity Argon Pa・L(Torr・L) 5.8×108(4.4×106) Hydrogen 4.6×106(3.4×104) Cooldown time min(Hz) 160/140(50/60) Mounting flange UVG-500 Compressor unit C30V Weight of cryopump kg 69.0 Wide Variety of Models, ranging from 6" diameter to 30" diameter. [6" Type] [8" Type] [10" Type] [12" Type] [16" Type] [20" Type] [22" Type] [30" Type]