| ¡á | CRYOPUMPS (STANDARD) 16" TYPE
U16 table start
| CRYO-U16 |
 |
| ¡á |
FEATURES |
| 1. |
중, 대형
생산장치에
최적입니다. |
| 2. |
Batch식 대형
성막장치에 최적. |
| 3. |
열부하에
강한 Type. |
|
|
|
¡á | SPECIFICATIONS |
|
Pumping speeds(20¡É) | Nitrogen |
L/s |
5,000 |
| Hydrogen |
10,000 |
| Argon |
4,200 |
| Water |
16,000 |
| Ultimate pressure |
Pa(Torr) |
10-7(10-9) |
| Maximum throughput |
Argon |
Pa・L/s(Torr・L/s) |
1.4¡¿103(11.0) |
| Hydrogen |
4.1¡¿102(3.1) |
| Pumping capacity |
Argon |
Pa・L(Torr・L) |
4.3¡¿108(3.3¡¿106) |
| Hydrogen |
2.4¡¿106(1.8¡¿104) |
| Cooldown time |
min(Hz) |
110/100(50/60) |
| Mounting flange |
UVG-400 |
| Compressor unit |
C30V |
| Weight of cryopump |
kg |
61.0 |
|
|
|
U16P table start
| CRYO-U16P |
 |
| ¡á |
FEATURES |
| 1. |
중, 대형
생산장치에 최적, |
| 2. |
CRYO-U16의 고부하형. |
|
|
|
¡á | SPECIFICATIONS |
|
Pumping speeds(20¡É) | Nitrogen |
L/s |
5,000 |
| Hydrogen |
10,000 |
| Argon |
4,200 |
| Water |
16,000 |
| Ultimate pressure |
Pa(Torr) |
10-7(10-9) |
| Maximum throughput |
Argon |
Pa・L/s(Torr・L/s) |
1.6¡¿103(12) |
| Hydrogen |
4.5¡¿102(3.4) |
| Pumping capacity |
Argon |
Pa・L(Torr・L) |
4.3¡¿108(3.3¡¿106) |
| Hydrogen |
2.4¡¿106(1.8¡¿104) |
| Cooldown time |
min(Hz) |
120/110(50/60) |
| Mounting flange |
UVG-400 |
| Compressor unit |
C30V |
| Weight of cryopump |
kg |
61.0 |
|
|
Wide Variety of Models, ranging from 6" diameter to 30" diameter.
[6" Type] [8" Type] [10" Type] [12" Type] [16" Type] [20" Type] [22" Type] [30" Type]
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