| ¡á | CRYOPUMPS (STANDARD) 10" TYPE
U10PU table start
| CRYO-U10PU |
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| ¡á |
FEATURES |
| 1. |
Multi운전(2대)으로
Running Cost의
절감이 가능. |
| 2. |
실험장치, 중규모
생산장치에 적격. |
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¡á | SPECIFICATIONS |
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Pumping speeds(20¡É) | Nitrogen |
L/s |
2,300 |
| Hydrogen |
3,600 |
| Argon |
2,000 |
| Water |
6,900 |
| Ultimate pressure |
Pa(Torr) |
10-7(10-9) |
| Maximum throughput |
Argon |
Pa・L/s(Torr・L/s) |
8.0¡¿102(6.0) |
| Hydrogen |
1.5¡¿102(1.1) |
| Pumping capacity |
Argon |
Pa・L(Torr・L) |
1.0¡¿108(7.8¡¿105) |
| Hydrogen |
6.7¡¿105(5.0¡¿103) |
| Cooldown time |
min(Hz) |
150/135(50/60) |
| Mounting flange |
UVG-250 |
| Compressor unit |
C15V/C2W-U |
| Weight of cryopump |
kg |
29.0 |
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Wide Variety of Models, ranging from 6" diameter to 30" diameter.
[6" Type] [8" Type] [10" Type] [12" Type] [16" Type] [20" Type] [22" Type] [30" Type]
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